Evaluation of bonding between oxygen plasma treated polydimethyl siloxane and passivated silicon
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چکیده
منابع مشابه
Evaluation of bonding between oxygen plasma treated polydimethyl siloxane and passivated silicon
Oxygen plasma treatment has been used extensively to bond polydimethyl siloxane to polydimethyl siloxane or glass in the rapid prototyping of microfluidic devices. This study aimed to improve the bonding quality of polydimethyl siloxane to passivated silicon using oxygen plasma treatment, and also to evaluate the bonding quality. Four types of passivated silicon were used: phosphosilicate glass...
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PLASMA BONDING OF POLY (DIMETHYL) SILOXANE AND GLASS SURFACES AND ITS APPLICATION TO MICROFLUIDICS by
ACKNOWLEDGEIVIENTS I would like to thank my thesis advisor Drs. Shubhra Gangopadhyay and Jordan Berg for their support, encouragement and valuable guidance throughout this work. I would not have been able to finish this work without their guidance and moral support. I am grateful to Dr. Gangopadhyay, La Pierre Chair Professor at the University of Missouri at Columbia, for giving her valuable ti...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/026